By Yuan Lin
This concise reference summarizes the most recent ends up in nano-structured skinny motion pictures, the 1st to debate either deposition tools and digital functions intimately.
Following an creation to this speedily constructing box, the authors current quite a few natural and inorganic fabrics in addition to new deposition thoughts, and finish with an outline of functions and concerns for his or her expertise deployment.
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Additional resources for Advanced Nano Deposition Methods
97, 083909. L. 5) grown on diﬀerent substrates. Phys. Rev. B, 70, 094407. D. (2009) Microscopic evidence of a strain-enhanced ferromagnetic state in LaCoO3 thin ﬁlms. Appl. Phys. , 95, 072508. X. (2010) Strain relaxation in epitaxial (Pb,Sr)TiO3 thin ﬁlms on NdGaO3 substrates. Appl. Phys. , 96, 102901. , and Suzuki, Y. (2010) Enhanced magnetism in epitaxial SrRuO3 thin ﬁlms. Appl. Phys. , 96, 082509. , and Suzuki, Y. (2010) Enhanced magnetization in epitaxial SrRuO3 thin ﬁlms via substrate-induced strain.
Chris et al. have grown Pt nanostructures with 94% purity using Pt(PF3 )4 as the precursor by electronbeam-induced deposition. 2 Electron Beam Evaporation System fabrication of ﬁeld-emitter arrays with a needle shape with high aspect ratio, which is hard to fabricate by semiconductor nanofabrication processes. The main contents in this chapter will focus on the introduction of electron beam evaporation deposition, including the principle, equipments for electron beam evaporation, application, and so on.
05 O2 , were fabricated by PLD . 4 Pulsed Laser Deposition for Multiferroics Thin Film Multiferroics is magnetism and ferroelectricity coexisting in materials and the quest for multiferroic materials is of great technological and fundamental importance since magnetism and ferroelectricity are essential to many forms of current technology [81, 82]. PLD system has been widely applied to fabricate not only the single-phase multiferroic thin ﬁlm but also the horizontal and vertical heterostructures.